Precision Measuring Instruments
Surface Roughness and Contour Measurement
SE & EF Series
SE & EF series are the most popular surface measuring instruments in the Kosaka Laboratory Ltd.'s line-up.
SE series and EF series enable high-resolution analysis in surface roughness measurement and contour measurement, respectively, embracing both Kosaka's fundamental and cutting-edge technology.
Step Height and Warpage Measurement
ET Series
ET series can trace and analyze nano-level micro figures with high accuracy. It is well-suited not only for silicon wafers but also for soft sample surfaces by controlling the contacting force on the measuring sample, enabling the stylus to have a feather-light touch.
A variety of sample sizes is available, ranging from φ160mm to 2200mm x 2600mm, depending on the model.
ET4000
ET8000
Roundness and Cylindricity Measurement
EC Series
A line-up of Roundness and Cylindricity Measuring instruments that proudly offer high rotational accuracy in their table motion. A variety of size options is available.
EC5200 is the ideal model for heavy duty workpiece. Space saving type with auto centering, tilting, flattering table is mounted.
EC5200
EC2500H has fully automatic centering and tilting adjustment. Options such as an automatic changeover function for O.D. and I.D. measurements, and a long column type are available.
EC2500H
EC1850H also has full automatic capabilities of centering/tilting and datasheet printing. This model is well-suited for smaller workpiece.
EC1850H
Articulated 3-D CMM
Beak Master
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BEAK MASTER is well designed for small workpieces and complicated 3D free-form surfaces smoothly, allowing anyone to make accurate measurements with ease. Compatibe with contact probe.
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Max. probing range : φ1200mm
Measuring accuracy：2σ ±0.015mm (our standard)
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Yes.
Contact Probe
No-contact Scanning Head
