FEATURED Products

Step Profiler / Micro CMM

Our step height measurement with wide range sensing and non-destructive new method for thru-hole measurement are the new offer to the smart manufacturing industry and next semiconductor world.

Step Profiler

Nanotexturer NT1520

Step height profiler NT1520 Introduction

Our step profiler Nanotexturer NT1520 uses linear actuation stylus with the 1300μm-wide sensing range, enabling one-time measurements across multiple areas, which means "no table leveling required."This step profiler is the ideal for automatic recipe measurements such as step height, film thickness, wafer patterns, and more.

Furthermore, this new product utilizes image sensing functions for on-screen measurements, which increase the usability and operatability, reduce the time required for measuring work and relieve operators from the stress of concentrated work through its "easy operation."

These features will ensure the quality of your product, as well as maintain a conducive work environment and enhance your productivity.

Micro CMM

FP-Labo/ FP-3030

A measuring instrument for the micro thru hole on TGVs on chiplets and TSVs on 3D-ICs

One of a Kind detecting system

No SEM required measuring machine

FP series Micro CMM enables non-distructive analysis with its glass fiber probe. FP series has the unique ability to reach into a φ10μm hole to a depth of 300μm,  making it the most suitable measuring equipment for inspecting the quality and condition of TGV on chiplets and TSV on 3D-ICs.

Micro-hole CMM_FP-Labo

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